SPECIFICATIONS

LOW-ENERGY ION SOURCE

• Ion energy: 100 - 2000 eV, continuously adjustable
• Ion current density: max. 10 mA/cm²
• Beam current: 7 - 80 mA, continuously adjustable
• Beam diameter: 750 - 1200 µm (FWHM)
• Electronically optimized working gas flow
• 28 µm/h milling rate on c-Si at 2000 eV ion energy and at 30° angle of beam incidence

SPECIMEN STAGE

• Milling angle: 0° - 40°, electronically adjustable in 0.1° increments
• Computer controlled in-plane specimen rotation and oscillation (from +10° to +60°, electronically adjustable in 10° steps)
• Remarkable thickness range of the accepted TEM samples (30 - 200 µm)

SPECIMEN HANDLING

• Vacuum load-lock system for fast specimen exchange
• Fully mechanical, glueless specimen loading system
• Specially designed titanium frames and encapsulation technology for XTEM samples

VACUUM SYSTEM

• Pfeiffer vacuum system with oil-free diaphragm and turbomolecular pumps equipped with compact, full-range Pirani/Penning vacuum gauge

GAS SUPPLY SYSTEM

• 99.999% purity argon gas of 1.3 - 1.7 bar absolute pressure
• Dedicated pressure regulator for noble gas service with electronic outlet pressure monitoring
• High-precision working gas flow control via motorized needle valve

IMAGING SYSTEM

• CMOS camera image for full visual control and milling supervision/termination
• High-resolution color CMOS camera
• Manual zoom video lens of 50 - 400× magnification range

COMPUTER CONTROL

• Built-in industrial grade PC
• Easy-to-use graphical interface and image analysis module
• Easy control of all important parameters by mouse clicking or dragging
• Highly automated operating regime for minimum user intervention
• Pre-programmed or manually set milling and polishing cycles
• Automatic termination: optical termination of the milling process supported by an image analysis module (detecting the sample perforation or monitoring the surface topography)

POWER REQUIREMENTS

• 100 - 120 V/3.0 A/60 Hz or 220 - 240 V/1.5 A/50 Hz – single phase

MODELS

• Gentle Mill – fully automated model
• Gentle Mill Hi – models compatible with Hitachi FIB/STEM systems

Instructors

Licensed Users