Picture of Vacuum/Air annealing furnance
Current status:
AVAILABLE
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2nd Responsible:
Group:
Thin Film Physics (TUNNF)
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Furnace up to 1100 degree C

 

Annealing

- Air

- Vacuum down to 1e-6 torr (RT) and 5e-4 torr at 900-1000 degree C. (Turbo pump + roughing pump)

 

Electrical characterisation

- Van Der Pauw measurement (resistivity) up to 1000 degree C and in vacuum 

- Seebeck/resistivity measurement setup up to 500 degree C in vacuum 

 

Free of charge, and possiblility to book and use after training with a responsible person.

 

Future updates on the devices (not available yet):

- Different atmosphere (gases, humidity)

Tool name:
Vacuum/Air annealing furnance
Category:
Other
Manufacturer:
Mti
Model:
-

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